I have always used a bleach solution for this. The one drawback is sponge media. It is easy to destroy the media itself from this method. That said, if the reason for sterilizing is the tank had a massive die off and the cause was unknown, I am inclined to throw out sponge media in any case. Sponges are cheap and easy to replace, so for me that is really not an issue.
Bleach also acts to breakdown organics, so it will also break down dried organics inside the media. This dried stuff would be starting you off with somewhat clogged media when you go to reuse it. All of the metal and plastic and glass parts etc. will not be affected by the sterilizing.
It easy to do, fill tank, add bleach, run filter etc. Then drain and rinse everything. By the time you are ready to use everything again you should rinse it before using it anyhow to get off the natural accumulation of dust etc. you will get unless you pretty much seal things up in bags.